Hitachi High-Tech (Japan)
companyTokyo, Tokyo, Japan
Research output, citation impact, and the most-cited recent papers from Hitachi High-Tech (Japan) (Japan). Aggregated across the NobleBlocks index of 300M+ scholarly works.
Total works
1.1K
Citations
21.5K
h-index
53
i10-index
584
Also known as
Hitachi High-TechHitachi High-Tech (Japan)日立ハイテクノロジーズ
Top research topics
Electron and X-Ray Spectroscopy Techniques(381)Advancements in Photolithography Techniques(290)Integrated Circuits and Semiconductor Failure Analysis(222)Advanced Electron Microscopy Techniques and Applications(158)Semiconductor materials and devices(121)Industrial Vision Systems and Defect Detection(91)Advanced Materials Characterization Techniques(55)Plasma Diagnostics and Applications(49)Advanced Surface Polishing Techniques(40)Ion-surface interactions and analysis(40)Force Microscopy Techniques and Applications(38)Copper Interconnects and Reliability(34)Surface Roughness and Optical Measurements(31)Surface and Thin Film Phenomena(31)Mass Spectrometry Techniques and Applications(28)
Top-cited papers from Hitachi High-Tech (Japan)
No indexed publications for this institution yet.