Dielectric Properties of (Ba, Sr)TiO<sub>3</sub> Thin Films Deposited by RF Sputtering

Horikawa, Tsuyoshi; Mikami, Noboru; Makita, Tetsuro; Tanimura, Junji; Kataoka, Masayuki; Sato Kazunao Sato, Kazunao; Nunoshita Masahiro Nunoshita, Masahiro

doi:10.1143/jjap.32.4126

Public

Dielectric Properties of (Ba, Sr)TiO3 Thin Films Deposited by RF Sputtering

Published in Japanese Journal of Applied Physics • Sep 1, 1993

Authors:

Tsuyoshi Horikawa

Noboru Mikami

Tetsuro Makita

Abstract

Thin films of (Ba 0.65 Sr 0.35 )TiO 3 (BST) have been prepared by an rf-sputtering method at substrate temperatures of 500 to 700°C. The dielectric constant of these films ranges from 190 to 700 at room temperature. This value changes with the grain size rather than the film thickness. The dielectri...

Subject

Dielectric

Materials science

Sputtering

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