Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

Popovici, M.; Van Elshocht, Sven; Menou, N.; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Brijs, Bert; Conard, Thierry; Opsomer, Karl; Willem Maes, Jan; J. Wouters, Dirk; A. Kittl, J.

doi:10.1149/1.3244213

Public

Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

Published in Journal of The Electrochemical Society • Dec 3, 2009

Authors:

M. Popovici

Sven Van Elshocht

N. Menou

Abstract

Atomic Layer Deposition of Strontium Titanate Films Using Sr ( #2#1Cp ) 2 and Ti ( OMe ) 4 , Popovici, M., Van Elshocht, S., Menou, N., Swerts, J., Pierreux, D., Delabie, A., Brijs, B., Conard, T., Opsomer, K., Maes, J. W., Wouters, D. J., Kittl, J. A.

Subject

Dielectric

Materials science

Stoichiometry

Finding related papers...

Discussions

(0)

No comments yet

Be the first to share your thoughts!