Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition

Joon Choi, Byung; Seop Jeong, Dong; Keun Kim, Seong; Rohde, Christina; Man Choi, Seong; Hak Oh, Joon; Jip Kim, Hong; Seong Hwang, Cheol; Szot, K.; Waser, Rainer; Reichenberg, B.; Tiedke, S.

doi:10.1063/1.2001146

Public

Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition

Published in Journal of Applied Physics • Aug 1, 2005

Authors:

Byung Joon Choi

Dong Seop Jeong

Seong Keun Kim

Abstract

The resistive switching mechanism of 20- to 57-nm-thick TiO2 thin films grown by atomic-layer deposition was studied by current-voltage measurements and conductive atomic force microscopy. Electric pulse-induced resistance switching was repetitively (> a few hundred times) observed with a resistance...

Subject

Materials science

Thin film

Electrical resistivity and conductivity

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