Experimental determination of the nanocrystalline volume fraction in silicon thin films from Raman spectroscopy

Bustarret, E.; Hachicha, M.A.; Brunel, M.

doi:10.1063/1.99054

Public

Experimental determination of the nanocrystalline volume fraction in silicon thin films from Raman spectroscopy

Published in Applied Physics Letters • May 16, 1988

Authors:

E. Bustarret

M.A. Hachicha

M. Brunel

Abstract

The effect of crystallite sizes L smaller than 100 nm on the integrated Raman cross section Σc of the transverse optical (TO) mode of fcc silicon was studied experimentally in fully nanocrystallized thin films. The Σc/Σa (amorphous) ratio of this mode is shown to be 1 up to L=30 Å, and to decay expo...

Subject

Raman spectroscopy

Materials science

Nanocrystalline silicon

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