Low-Temperature Preparation of Pb(Zr, Ti)O<sub>3</sub> Thin Films on (Pb, La)TiO<sub>3</sub> Buffer Layer by Multi-Ion-Beam Sputtering

Kanno, Isaku; Hayashi, Shigenori; Kamada, Takeshi; Kitagawa, Masatoshi; Hirao Takashi Hirao, Takashi

doi:10.1143/jjap.32.4057

Public

Low-Temperature Preparation of Pb(Zr, Ti)O3 Thin Films on (Pb, La)TiO3 Buffer Layer by Multi-Ion-Beam Sputtering

Published in Japanese Journal of Applied Physics • Sep 1, 1993

Authors:

Isaku Kanno

Shigenori Hayashi

Takeshi Kamada

Abstract

Ferroelectric lead-zirconate-titanate (PZT) thin films were successfully fabricated by the multi-ion-beam sputtering technique in an oxygen ambient at a low substrate temperature of 415°C. By inserting lead-lanthanum-titanate (PLT) buffer layers between substrates and PZT films, the perovskite-PZT t...

Subject

Materials science

Ferroelectricity

Thin film

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