Synthesis of Large‐Area MoS<sub>2</sub> Atomic Layers with Chemical Vapor Deposition

Lee, Yi‐Hsien; Zhang, Xinquan; Zhang, Wenjing; Chang, Mu‐Tung; Lin, Cheng‐Te; Chang, Kai‐Di; Yu, Ya-Chu; Tse‐Wei Wang, Jacob; Chang, Chia‐Seng; Li, Lain‐Jong; Lin, Tsung‐Wu

doi:10.1002/adma.201104798

Public

Synthesis of Large‐Area MoS2 Atomic Layers with Chemical Vapor Deposition

Published in Advanced Materials • Mar 30, 2012

Authors:

Yi‐Hsien Lee

Xinquan Zhang

Wenjing Zhang

Abstract

Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the s...

Subject

Chemical vapor deposition

Materials science

Monolayer

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