Flare and its impact on low-k 1 KrF and ArF lithography

M. La Fontaine, Bruno; Dusa, Mircea; Acheta, Alden; Chen, Cinti; Bourov, Anatoly; Levinson, Harry; C. Litt, Lloyd; Mulder, Melchior; Seltman, Rolf; van Praagh, Judith

doi:10.1117/12.474598

Public

Flare and its impact on low-k 1 KrF and ArF lithography

Published in Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE • Jul 15, 2002

Authors:

Bruno M. La Fontaine

Mircea Dusa

Alden Acheta

Abstract

We present a complete method for the characterization and modeling of flare based on the measurement of the modulation transfer function (MTF) of scanners. A point-spread function (PSFscat) representing only the scattered light or flare in the tool is inferred by comparing the measured MTF with a ca...

Subject

Flare

Optics

Optical transfer function

Finding related papers...

Discussions

(0)

No comments yet

Be the first to share your thoughts!