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Metrology in a scanning electron microscope: theoretical developments and experimental validation
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Metrology in a scanning electron microscope: theoretical developments and experimental validation
Published in
Measurement Science and Technology
• Aug 31, 2006
Authors:
Michael A. Sutton
,
Ning Li
,
Dorian Garcia
+5 more
Abstract
International audience
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Distortion (music)
Pixel
Optics
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