Physical properties of Al<i>x</i>In1−<i>x</i>N thin film alloys sputtered at low temperature

Beşleagă, Cristina; Catalin Galca, Aurelian; Miclea, C.; Mercioniu, Ionel; Enculescu, Monica; E. Stan, George; Mateescu, A.O.; Dumitru, V.; Costea, S.

doi:10.1063/1.4898565

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Physical properties of AlxIn1−xN thin film alloys sputtered at low temperature

Published in Journal of Applied Physics • Oct 20, 2014

Authors:

Cristina Beşleagă

Aurelian Catalin Galca

C. Miclea

Abstract

In this paper, we report on the structural, optical, and electrical properties of a wide compositional range of AlxIn1−xN thin layers deposited on glass and polyethylene terephthalate substrates. AlxIn1−xN layers of controlled composition were obtained by a simple reactive magnetron co-sputtering pr...

Subject

Thin film

Materials science

Indium

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