Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low-pressure radio frequency discharges

Böhm, Christian; Perrin, J.

doi:10.1063/1.1144398

Public

Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low-pressure radio frequency discharges

Published in Review of Scientific Instruments • Jan 1, 1993

Authors:

Christian Böhm

J. Perrin

Abstract

A four-grid electrostatic energy analyzer for measurements of the ion velocity distribution and the emission of secondary electrons on the electrodes of low-pressure radio frequency glow-discharge systems has been conceived. Problems arising from poor analyzer design are discussed and the performanc...

Subject

Secondary emission

Atomic physics

Secondary electrons

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