A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

Wu, Naiqi; Chu, Chengbin; Chu, Feng; Zhou, Meng

doi:10.1109/tsm.2008.2000425

Public

A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

Published in IEEE Transactions on Semiconductor Manufacturing • May 1, 2008

Authors:

Naiqi Wu

Chengbin Chu

Feng Chu

Abstract

With wafer residency time constraints for some wafer fabrication processes, such as low pressure chemical-vapor deposition, the schedulability and scheduling problems are still open. This paper aims to solve both problems. A Petri net (PN) model is developed for the system. This model describes when...

Subject

Petri net

Time constraint

Schedule

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