The coupled-wave method formulated by Moharam and Gaylord [ J. Opt. Soc. Am.73, 451 ( 1983)] is known to be slowly converging, especially for TM polarization of metallic lamellar gratings. The slow convergence rate has been analyzed in detail by Li and Haggans [ J. Opt. Soc. Am. A10, 1184 ( 1993)], ...
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