Highly p-doped regions in silicon solar cells quantitatively analyzed by small angle beveling and micro-Raman spectroscopy

Highly p-doped regions in multicrystalline silicon solar cells, such as the back surface field region, are analyzed by means of small angle beveling and micro-Raman spectroscopy. Small angle beveling and subsequent Secco etching are used to enhance the lateral resolution of the micro-Raman spectrosc... View More