Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

This paper presents the findings of a design, modeling, and fabrication study of ZnO and PbZr/sub 0.3/Ti/sub 0.7/O/sub 3/ thin-film bulk acoustic resonators and filters. Measurements of the high-frequency responses of ZnO resonators having different area are used to develop an acoustic model that ac... View More