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Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices
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Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices
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Shared by
NobleBlocks
on Oct 1, 2005 • 12:00 AM UTC
Authors:
M. Benetti
,
D. Cannata
,
F. Di Pictrantonio
+1 more
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Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices | NobleBlocks