SOI sensing technologies for harsh environment

Udrea, Florin; Z. Ali, S.; Brezeanu, M.; Dumitru, V.; Buiu, Octavian; Poenaru, I.; Chowdhury, M.F.; De Luca, Andrea; W. Gardner, Julian

doi:10.1109/smicnd.2012.6400708

Public

SOI sensing technologies for harsh environment

Published • Oct 1, 2012

Authors:

Florin Udrea

S. Z. Ali

M. Brezeanu

Abstract

This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO2Capture and Sequestration, (iii) oil & gas stora...

Subject

Silicon on insulator

Silicon

Computer science

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