Physical principles and miniaturization of spark assisted chemical engraving (SACE) | NobleBlocks

Physical principles and miniaturization of spark assisted chemical engraving (SACE)

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Physical principles and miniaturization of spark assisted chemical engraving (SACE)

Published in Journal of Micromechanics and Microengineering • Sep 6, 2005

Authors:

Rolf Wüthrich

,

Lucas A. Hof

,

A.M. Nandhu Lal

Abstract

International audience

Subject

Miniaturization

SPARK (programming language)

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Publication Date: Sep 6, 2005 • 12:00 AM UTC

NobleID:w1/20260525/6925D427

DOI:10.1088/0960-1317/15/10/s03

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