Hydrogen Gas Sensor Based on Nanocrystalline SnO2 Thin Film Grown on Bare Si Substrates

H. Kadhim, Imad; Abu Hassan, H.; Abdullah, Q.N.

doi:10.1007/s40820-015-0057-1

Public

Hydrogen Gas Sensor Based on Nanocrystalline SnO2 Thin Film Grown on Bare Si Substrates

Published in Nano-Micro Letters • Aug 18, 2015

Authors:

Imad H. Kadhim

H. Abu Hassan

Q.N. Abdullah

Abstract

In this paper, high-quality nanocrystalline SnO 2 thin film was grown on bare Si (100) substrates by a sol–gel method. A metal–semiconductor–metal gas sensor was fabricated using nanocrystalline SnO 2 thin film and palladium (Pd) metal. The contact between Pd and nanocrystalline SnO 2 film is tunabl...

Subject

Nanocrystalline material

Materials science

Thin film

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