Surface Morphology-Dependent Room-Temperature LaFeO<sub>3</sub> Nanostructure Thin Films as Selective NO<sub>2</sub> Gas Sensor Prepared by Radio Frequency Magnetron Sputtering

Thirumalairajan, S.; Girija, K.; Roberto Mastelaro, Valmor; Ponpandian, N.

doi:10.1021/am503318y

Public

Surface Morphology-Dependent Room-Temperature LaFeO3 Nanostructure Thin Films as Selective NO2 Gas Sensor Prepared by Radio Frequency Magnetron Sputtering

Published in ACS Applied Materials & Interfaces • Jul 16, 2014

Authors:

S. Thirumalairajan

K. Girija

Valmor Roberto Mastelaro

Abstract

In the present work, perovskite LaFeO3 thin films with unique morphology were obtained on silicon substrate using radio frequency magnetron sputtering technique. The effect of thickness and temperature on the morphological and structural properties of LaFeO3 films was systematically studied. The X-r...

Subject

Materials science

Thin film

Sputter deposition

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