An all-glass 12 μm ultra-thin and flexible micro-fluidic chip fabricated by femtosecond laser processing

This study investigated and established a method, using femtosecond laser processing, to fabricate a 100%-glass-based 12 μm ultra-thin and flexible micro-fluidic chip. First we investigated the suitable pulse energy of the laser to fabricate ultra-thin glass sheets and then we fabricated a prototype... View More