Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Mota‐Santiago, Pablo; Vázquez, Henrique; Bierschenk, T.; Kremer, Felipe; Nadzri, A.; Schauries, D.; Djurabekova, Flyura; Nordlund, K.; Trautmann, C.; Mudie, Stephen; Ridgway, M.C.; Kluth, P.

doi:10.1088/1361-6528/aaabdb

Public

Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Published in Nanotechnology • Jan 31, 2018

Authors:

Pablo Mota‐Santiago

Henrique Vázquez

T. Bierschenk

Abstract

Abstract The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μ m thick amorphous SiN x :H and SiO x :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core s...

Subject

Materials science

Amorphous solid

Silicon nitride

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