Layer-by-layer growth of ε-Ga 2 O 3 thin film by metal–organic chemical vapor deposition

Layer-by-layer morphology is a crucial signature of the quality of epitaxial thin films. In this study, layer-by-layer growth of an ε-phase gallium oxide (ε-Ga 2 O 3 ) thin film is demonstrated using metal–organic chemical vapor deposition. A two-step growth method, in which a nucleation layer is gr... View More