Experimental and numerical investigation of biosensors plasmonic substrates induced differences by e-beam, soft and hard UV-NIL fabrication techniques

Bryche, Jean‐François; Hamouda, Frédéric; Besbes, Mondher; Gogol, Philippe; Moreau, Julien; Lamy de la Chapelle, Marc; Canva, Michael; Bartenlian, B.

doi:10.1016/j.mne.2018.11.003

Public

Experimental and numerical investigation of biosensors plasmonic substrates induced differences by e-beam, soft and hard UV-NIL fabrication techniques

Published in Micro and Nano Engineering • Nov 17, 2018

Authors:

Jean‐François Bryche

Frédéric Hamouda

Mondher Besbes

Abstract

This paper compares plasmonic substrates manufactured by three lithography methods: E-beam, soft and hard UV NanoImprint Lithography. The different plasmonic modes existing in samples made of an array of gold nanostructures on gold film are investigated for biochemical detections taking advantage of...

Subject

Nanoimprint lithography

Plasmon

Materials science

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