Design and applications of MEMS flow sensors: A review

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Design and applications of MEMS flow sensors: A review

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Shared by NobleBlocks on Jun 12, 2019 • 12:00 AM UTC

Authors:

Fatemeh Ejeian

,

Shohreh Azadi

,

Amir Razmjou

Subject

Microelectromechanical systems

Piezoresistive effect

Computer science

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Publication Date: Jun 12, 2019 • 12:00 AM UTC

NobleID:w1/20260526/E5220F1C

DOI:10.1016/j.sna.2019.06.020

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Design and applications of MEMS flow sensors: A review | NobleBlocks