High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

Abstract Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$ ng ∕ Hz (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a... View More