A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms

Sabzi, Masoud; Mousavi Anijdan, S.H.; Shamsodin, Milad; Farzam, Mansour; Hojjati–Najafabadi, Akbar; Feng, Peizhong; Park, Nokeun; Lee, Unhae

doi:10.3390/coatings13010188

Public

A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms

Published in Coatings • Jan 14, 2023

Authors:

Masoud Sabzi

S.H. Mousavi Anijdan

Milad Shamsodin

Abstract

Chemical vapor deposition (CVD) is a process that a solid is formed on a substrate by the chemical reaction in the vapor phase. Employing this technology, a wide range of materials, including ceramic nanocomposite coatings, dielectrics, and single crystalline silicon materials, can be coated on a va...

Subject

Chemical vapor deposition

Materials science

Ceramic

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