Piezoelectric thin films for MEMS | NobleBlocks

Piezoelectric thin films for MEMS

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Piezoelectric thin films for MEMS

Published in Applied Physics Letters • Feb 27, 2023

Authors:

Isaku Kanno

,

Jun Ouyang

,

Jun Akedo

Abstract

LC

Subject

Piezoelectricity

Microelectromechanical systems

Materials science

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Publication Date: Feb 27, 2023 • 12:00 AM UTC

NobleID:w1/20260525/CBA258D2

DOI:10.1063/5.0146681

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