Vertical PtOx/Pt/ β -Ga2O3 Schottky diodes with high permittivity dielectric field plate for low leakage and high breakdown voltage

Farzana, Esmat; Roy, Saurav; S. Hendricks, Nolan; Krishnamoorthy, Sriram; S. Speck, James

doi:10.1063/5.0171876

Public

Vertical PtOx/Pt/ β -Ga2O3 Schottky diodes with high permittivity dielectric field plate for low leakage and high breakdown voltage

Published in Applied Physics Letters • Nov 6, 2023

Authors:

Esmat Farzana

Saurav Roy

Nolan S. Hendricks

Abstract

We demonstrate Schottky barrier engineering using PtOx/thin Pt Schottky contacts combined with edge termination using a high permittivity dielectric (ZrO2) field-plate for high-voltage vertical β-Ga2O3 diodes. A systematic study of baseline bare Pt/β-Ga2O3, PtOx/thin Pt/β-Ga2O3, and PtOx/β-Ga2O3 Sch...

Subject

Materials science

Schottky diode

Schottky barrier

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