Nanoindentation and Stability Response of Sub-100 nm PECVD-Grown Silicon Nitride Single- and Double-Layer Antireflection Coatings

, Alamgeer; Yousuf, Hasnain; Bae, Junhan; Ur Rahman, Rafi; Lee, Gahong; Park, Sangheon; Quddamah Khokhar, Muhammad; Yi, Junsin

doi:10.1021/acsanm.5c04718

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Nanoindentation and Stability Response of Sub-100 nm PECVD-Grown Silicon Nitride Single- and Double-Layer Antireflection Coatings

Shared by NobleBlocks on Dec 23, 2025 • 12:00 AM UTC

Authors:

Alamgeer

Hasnain Yousuf

Junhan Bae

Abstract

This study presents a comprehensive mechanical and environmental stability assessment of sub-100 nm PECVD-grown silicon nitride (SiNx) antireflection coatings in single-layer (SLAR) and double-layer (DLAR) configurations for photovoltaic applications. Nanoindentation was performed on SiNx SLAR 75 nm...

Subject

Materials science

Nanoindentation

Silicon nitride

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